Effects of Annealing on the Structural and Optical Properties of V2O5 Thin Films Prepared by RF Sputtering for Humidity Sensor Application

In this work, vanadium pentoxide (V2O5) thin films were prepared using rf magnetron sputtering on silicon wafer and glass substrates from V2O5 target at 200 °C substrate temperature, followed by annealing 400 500 in air for 2 h. The examined X-ray diffraction (XRD), forier transform infra-red spectroscopy (FTIR), UV-visible absorbance, direct current coductivity to study the effects of temperature their structural optical properties. XRD analysis exhibited that promoted highly crystallized phase is orientated along c direction. crystalline size increased 22.5 nm 35.4 with increasing °C. FTIR showed enhancement characteristics band energy gap sample deposited slides decreased 2.85 eV, as sample, 2.6 eV upon There was a linear dependence between sensitivity relative humidity (RH) range 25% 70%, while behavior exponential high RH range.